Detection and Analysis of Parkinson's Disease Using Piezo Resistive Tactile Mems Sensor

Abstract

In this paper, an accurate methodology  is proposed to detect compliance  of soft tissue using  two serpentine  springs  as a combined  structure in micro  machined  piezo resistive  tactile sensor, small vibrations  and variations with live  tissue also detected. The measuring range of the sensor is chosen to be associated with the soft-tissue properties. Here 10-80 milli-newton force is applied on the soft tissue and the variations in the tissue are observed, and compared with the existing  methods.  From the observations, it is  found that the sensor output  stress  sensitivity   varies   linearly   with  the  variation   in  applied   force.  The sensor parameters are optimized to give high sensitivity  and linearity  of the sensor output. To detect the healthy tissue  more force needed to be applied  on the proof-mass,  which  varies the stress applied  on the tissue. A light  stress is to be applied if it is damaged. Using COMSOL TOOL the design is simula ted for  checking  the  sensor  performance  and  compared  which  micro machined  tactile sensor design which is simulated  using  the ANSYS tool.