Design, Sensitivity Enhanced Analysis of MEMS CAPS Structures for BP and Glaucoma Measurement

Abstract

In recent years, MEMS (Micro Electro Mechanical System) based Capacitive Pressure Sensors (MEMS CAPS) became cynosure in patient’s health monitoring applications. To evince the importance of these devices, in this paper, we explained the design, simulation and analysis of MEMS CAPS devices with conventional, side suspended and corner suspended square diaphragms to explore and enhance the sensitivity among them. And reported a novel high sensitivity and linear CPS for low-pressure biomedical applications. The proposed work has two different diaphragm structures such as side suspended and corner suspended square with silicon dielectric material and dimensions.  The design parameters such as displacement and sensitivity are extracted with COMSOL Multiphysics 5.0 software through the Finite Element Method (FEM). To measure the capacitance corresponding to the diaphragm’s displacement, a small scale of pressure applied on the membrane surface within the pressure range of 1kPa-10kPa. Simulations are carried out using The displacement and sensitivity of the corner suspended square diaphragm may give better results when compared to other structures.