Systematic Review on Design & Development of efficient semiconductor based SAW gas sensor

Abstract

Leakage of toxic gases causing fire, explosions and even affects surviving conditions of living beings.
Highly sensitive nature of SAW based sensor is able to detect small amount of change in chemical
quantity. So, SAW based sensors are helpful & reduce the chances of disaster.The design, analysis,
optimization, and simulation of SAW-based gas sensors are exhibited.Thin film used in SAW based
sensors adsorbs the chemical particles from the environment, density of thin film increases which
results in the frequency shift in applied signal. SAW based sensors can detect small change in
frequency even at small loading effect, this effect occurs when small amount of particles are absorbed
by thin film. Sensitivity of SAW based sensor can further be enhanced by varying the various
parameters of implemented sensing module i.e. substrate and thin film thickness, IDT legs variation.
By considering different material for substrate (Quartz, Lithium Neonates, and Lithium Tantalite’s)
and varying their thickness, enhanced sensitivity can be achieved. Sensing module can be
implemented on COMSOL metaphysics 5.3a.